1/30/2011	6:57:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/30/2011	6:57:21 PM	Recipe started at 6:57 PM
1/30/2011	6:57:21 PM	H2 valve closed
1/30/2011	6:57:21 PM	BCl3 valve closed
1/30/2011	6:57:21 PM	PH3 valve closed
1/30/2011	6:57:21 PM	SiCl4 pre valve closed
1/30/2011	6:57:21 PM	SiCl4 post valve closed
1/30/2011	6:57:21 PM	Main Vac valve closed
1/30/2011	6:57:21 PM	Bypass valve closed
1/30/2011	6:57:21 PM	Bubbler valve closed
1/30/2011	6:57:21 PM	Helium valve opened
1/30/2011	6:57:21 PM	Helium MFC set to  500.000000
1/30/2011	6:57:21 PM	H2 MFC set to  0.000000
1/30/2011	6:57:21 PM	BCl3 MFC set to  0.000000
1/30/2011	6:57:21 PM	PHl3 MFC set to  0.000000
1/30/2011	6:57:21 PM	SiCl4 MFC set to  0.000000
1/30/2011	6:57:21 PM	Bypass solenoid MFC set to  0.000000
1/30/2011	6:57:21 PM	Tube furnace set to 0
1/30/2011	6:57:42 PM	Helium valve closed
1/30/2011	6:57:42 PM	H2 valve closed
1/30/2011	6:57:42 PM	BCl3 valve closed
1/30/2011	6:57:42 PM	PH3 valve closed
1/30/2011	6:57:42 PM	SiCl4 pre valve closed
1/30/2011	6:57:42 PM	SiCl4 post valve closed
1/30/2011	6:57:42 PM	Main Vac valve closed
1/30/2011	6:57:42 PM	Bypass valve closed
1/30/2011	6:57:42 PM	Bubbler valve closed
1/30/2011	6:57:42 PM	Helium MFC set to  0.000000
1/30/2011	6:57:42 PM	H2 MFC set to  0.000000
1/30/2011	6:57:42 PM	BCl3 MFC set to  0.000000
1/30/2011	6:57:42 PM	PHl3 MFC set to  0.000000
1/30/2011	6:57:42 PM	SiCl4 MFC set to  0.000000
1/30/2011	6:57:42 PM	Bypass solenoid MFC set to  0.000000
1/30/2011	6:57:43 PM	Tube furnace set to 0
1/30/2011	6:57:43 PM	Run finished at 6:57 PM
1/30/2011	6:57:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
